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Semiconductor specific multi-channel temperature control equipment

Mainly used for precise temperature control of multiple reaction chambers in semiconductor processes, the device consists of a heat exchanger, a circulating pump, a compressor, and a control system. Advanced control algorithms are used to improve the stability, temperature control accuracy, and reaction speed of the chiller. The temperature control accuracy can reach ± 0.5 ℃ under load conditions, and can be controlled arbitrarily between -20 ℃ and 85 ℃, with good temperature stability.

The products are divided into:
1. Single channel series
2. Dual channel series
3. Three channel system

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PROTECO

See the parameters clearly

Name

Single channel series
temperature range
accuracy
Cooling capacity
Heating capacity
flow
Port size
temperature range
Required traffic
Port size
Import pressure
Dual channel series
temperature range
accuracy
Cooling capacity
Heating capacity
flow
Port size
temperature range
Required traffic
Port size
Import pressure
Three channel series
temperature range
accuracy
Cooling capacity
Heating capacity
flow
Port size
temperature range
Required traffic
Port size
Import pressure

Parameter

-20℃~+80℃
±0.1℃
2kw@-10℃
3kw
20LPM@0.6MPa
Rc3/4"
15~20°C
15LPM
Rc1/2"
0.3~0.7MPa
-45℃~+40℃
±0.2℃
11kw@-20℃/5kw@-40℃
2kw
17LPM@0.6MPa
Rc3/4"
15~20°C
30LPM
Rc1/2"
0.3~0.7MPa
-20℃~+50℃
±0.1℃
15kw@-10℃
2kw
30LPM@0.85MPa
Rc3/4"
15~20°C
30LPM
Rc3/4"*2
0.3~0.7MPa

Product recommendations

Using a set of cooling heat exchangers and a set of heating heat exchangers, the proportion control valve is used to control the heat and cold entering the heat exchanger, and then the unified medium is input into the reactor jacket for heat exchange and temperature control. The system is equipped with an expansion tank.

Secondary heat exchange TCU solution

Integrate existing thermal energy (such as steam, cooling water, and ultra-low temperature liquids) into a single fluid system or secondary circuit used to control the temperature of process equipment, forming a non-contact temperature control system for a single heat conduction liquid in the reaction vessel jacket

Direct TCU solution

In the product development and production processes of the chemical and pharmaceutical industries, temperature control is crucial for safe and high-quality reaction products. Putec's PTHC series is suitable for process industry and process engineering, and is applied to dynamic constant temperature control of cold and heat sources such as jacket reactors, microchannel reactors, reaction devices, combined chemistry, as well as low-temperature distillation, distillation, extraction and other equipment in the pharmaceutical industry.

High precision high and low temperature integrated machine

Applied to reliability tests such as characteristic analysis of components, high and low temperature temperature variation testing, temperature shock testing, failure analysis, etc

Semiconductor device high and low temperature testing equipment

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